KLA
4PP-TypeC
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The KLA 4PP-TypeC is a four-point probe. The KLA 4PP-TypeC has 1 mm spacing, 200 um tip radius, and 100 gm. The KLA 4PP-TypeC is used for implant and high-impedance surface measurement.[1][2]
What it is
The KLA 4PP-TypeC is a four-point probe accessory used with thin-film resistance measurement systems.[1][2]
The KLA 4PP-TypeC belongs to a family of KLA 4PP-Type probes that includes multiple lettered variants.[2][3]
How it works
The KLA 4PP-TypeC has 1 mm spacing, a 200 um tip radius, and 100 gm force.[1]
Where it fits in the process flow
The KLA 4PP-TypeC is used for implant and high-impedance surface measurement.[1]
Applications
The KLA 4PP-TypeC is intended for use with Filmetrics R50 and R54 4PP measurement systems.[1]
What do the numbers mean?
Configuration & options6
What replaced it?
Related models
- siblingKLA 4PP-TypeA— Listed as a separate model in the same 4PP product family.source[3]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What probe geometry does the KLA 4PP-TypeC have?
The KLA 4PP-TypeC has 1 mm spacing and a 200 um tip radius.[1]
What measurements is the KLA 4PP-TypeC intended for?
The KLA 4PP-TypeC is intended for implant and high-impedance surface measurement.[1]
What systems use the KLA 4PP-TypeC?
The KLA 4PP-TypeC is for use with Filmetrics R50 and R54 4PP measurement systems.[1]
Not publicly documented
The following facts about the 4PP-TypeC are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 4PP-TypeC are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 4PP-TypeC are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 4PP-TypeC are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 4PP-TypeC are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 4PP-TypeC is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]store.kla-instruments.com — store.kla-instruments.comstore.kla-instruments.com
- [2]4PP-TypeC — KLA | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [3]store.kla-instruments.com — store.kla-instruments.comstore.kla-instruments.com
Last updated Oct 9, 2026.