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Hitachi

SFT 9550 X Fluorescence X-ray Film Thickness Meter

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What it is

The Hitachi SFT 9550 X is an XRF film thickness meter categorized under metrology and inspection.[1][2]

Where it fits in the process flow

General reference — not yet source-verified

XRF film thickness meters are used in semiconductor fabrication and other thin-film industries for non-destructive metrology after deposition processes such as physical vapor deposition, electroplating, or electroless plating. The measurement step typically occurs after the film is deposited and before further processing, providing feedback for process control. Downstream steps may include etching or patterning that rely on known film thickness.

Applications

General reference — not yet source-verified

Common applications of XRF film thickness meters include measuring the thickness of metal films such as gold, nickel, copper, tin, and solder alloys on substrates like silicon wafers, ceramic packages, or printed circuit boards. The technique is also used for composition analysis of alloy films and for quality assurance in plating lines. In semiconductor packaging, XRF is employed to measure under-bump metallization and lead-free solder thickness.

What do the numbers mean?

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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the SFT 9550 X Fluorescence X-ray Film Thickness Meter are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No specifications for the SFT 9550 X Fluorescence X-ray Film Thickness Meter are on record.

    Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SFT 9550 X Fluorescence X-ray Film Thickness Meter are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the SFT 9550 X Fluorescence X-ray Film Thickness Meter are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the SFT 9550 X Fluorescence X-ray Film Thickness Meter are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the SFT 9550 X Fluorescence X-ray Film Thickness Meter are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]SFT 9550 X Fluorescence X-ray Film Thickness Meter — Hitachi | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 7, 2026.

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