Hitachi
S 9380 II CD-SEM
The Hitachi S 9380 II is a critical dimension scanning electron microscope (CD-SEM) used for measuring critical dimensions on semiconductor wafers. The S 9380 II is available with a 12-inch E3 port and an 8-inch OCL2300 port.[1][2][3]
What it is
The Hitachi S 9380 II is a critical dimension scanning electron microscope (CD-SEM). The S 9380 II supports 12-inch and 8-inch wafer handling via its E3 and OCL2300 ports.[1]
How it works
General reference — not yet source-verifiedA CD-SEM produces an image by scanning a focused electron beam over the sample surface. Secondary electrons emitted from the sample are collected to form an image that reveals the topography and edge profiles of microscopic features. The instrument measures distances between edges in the image to determine critical dimensions.
Applications
General reference — not yet source-verifiedCD-SEMs are applied to measure critical dimensions of resist patterns, etched lines, contact holes, and other features. CD-SEMs are used for in-line monitoring and development of semiconductor devices. The tools are also suitable for failure analysis and process characterization.
What do the numbers mean?
Power & electrical3
- Single Phase[2]
Vacuum & pumping1
Control & software1
Dimensions & facilities1
Configuration & options7
- 12" E3 Port / 8" OCL2300 Port[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the Hitachi S 9380 II?
The Hitachi S 9380 II is a critical dimension scanning electron microscope (CD-SEM).[1]
Not publicly documented
The following facts about the S 9380 II CD-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 9380 II CD-SEM are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the S 9380 II CD-SEM are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the S 9380 II CD-SEM are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the S 9380 II CD-SEM are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the S 9380 II CD-SEM is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Equipment inventory listing
Last updated Sep 30, 2026.
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