Hitachi
S 9220 CD-SEM
The Hitachi S 9220 CD-SEM is a critical dimension scanning electron microscope used for length measurement of semiconductor features. The Hitachi S 9220 CD-SEM offers a measuring range of 0.1 μm to 2.0 μm and a throughput of 56 wafers per hour. The Hitachi S 9220 CD-SEM achieves a secondary electron image resolution of 3 nm at an acceleration voltage of 0.8 kV.[1][2]
Wafer size
Wafer Transfer Robot:
Power
208 V, 60 Hz[3]
Performance
40k-150k-200k times[1]
Optics
± 1% or 3 nm (3σ) larger value[1]
How it works
The Hitachi S 9220 uses an electromagnetic lens system with a booster stock lens and a detection system that employs a scintillator/photomultiplier detector with an EXB filter for two-stage detection of secondary and backscattered electrons. The acceleration voltage is variable from 500 to 1600 V in 10 V steps. The stage uses pulse motor drive with linear encoder positioning and provides 200 mm travel in both X and Y axes at speeds up to 100 mm/s. The system includes an automatic wafer transfer robot with random access for two cassettes and vacuum suction chucking.[1][2]
What do the numbers mean?
Power & electrical9
- Single Phase[3]
Vacuum & pumping4
- Loader System
- Automatic transfer by wafer transfer robot; random access type for 2 cassettes; vacuum suction chucking on back side; automatic OF/V-notch detection by optical sensor[1]
- Vacuum Exhaust System
- Fully automatic dry clean exhaust system; 3 ion pumps, two turbo molecular pumps, 2 dry pumps (supplied)[1]
- Safety Functions
- Protection function in the event of a power outage; AIR pressure drop; cooling water flow rate drop (self) with dynamic valve closing function; pump stop function[1]
Wafer handling8
- Loader System:[1]
Optics & imaging11
- For magnification exceeding 150k times, the effect of electron beam irradiation shall be excluded[1]
- Image Magnification:[1]
- Detection System
- Scintillator / photomultiplier detector using EXB filter; 2 stage detection method for SE and BSE images[1]
- Optical Microscope
- Approximately 1.2 mm square field of view, with black and white CCD camera[1]
Performance1
Control & software4
Configuration & options21
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Power Supply208 V, 60 Hz[3]
- ConfigurationSingle Phase[3]
- Secondary Electron Image Resolution3 nm (acceleration voltage 0.8 kV)[1]
- Voltage100V[6]
- Frequency60 Hz[7]
- Loader SystemAutomatic transfer by wafer transfer robot; random access type for 2 cassettes; vacuum suction chucking on back side; automatic OF/V-notch detection by optical sensor[1]
- Acceleration Voltage500 to 1600 V (variable in 10 V steps)[1]
- Vacuum Exhaust SystemFully automatic dry clean exhaust system; 3 ion pumps, two turbo molecular pumps, 2 dry pumps (supplied)[1]
- Safety FunctionsProtection function in the event of a power outage; AIR pressure drop; cooling water flow rate drop (self) with dynamic valve closing function; pump stop function[1]
- Power Supply (208V variant)208 V, 60 Hz, Single Phase[3]
- Power Supply (100V variant)100V, 60 Hz, Single Phase, 6kVA[6]
- Power Supply (200V variant)200V, 60 Hz, Single Phase[7]
- Chucking MethodVacuum suction on the back side of the wafer[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes does the Hitachi S 9220 support?
The S 9220 supports 2-inch, 8-inch, and 12-inch wafers.[3][1][6]
What is the secondary electron image resolution?
The resolution is 3 nm at an acceleration voltage of 0.8 kV.[1][2]
What is the throughput of the system?
Throughput is 56 wafers per hour in continuous measurement mode.[1][2]
Not publicly documented
The following facts about the S 9220 CD-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 9220 CD-SEM are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the S 9220 CD-SEM are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the S 9220 CD-SEM are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the S 9220 CD-SEM are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the S 9220 CD-SEM is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (7)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]inventory listing
- [3]Inventory photo
- [4]Inventory photo
- [5]Inventory photo
- [6]inventory listing
- [7]inventory listing
Last updated Sep 24, 2026.
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