FEI

Quanta 600 FEG

Metrology & Inspection FEI Quanta 600 FEG family

Research Quality: 50% complete

LinkedIn X Email

Quanta 600 FEG — nano.upenn.edu — Fig. 01Quanta 600 FEGnano.upenn.edu^[1]

Plate 01FEI Quanta 600 FE-SEM| 360˚ viewer
Microscopy and Imaging Center-TAMUWatch on YouTube

Vacuum

6 x 10^-4 Pa to ~1000 Pa^[1]

Gas delivery

For platinum and gold e-beam deposition^[1]

Optics

1.5 nm^[1]

What is it?

Applications

The Quanta 600 FEG is used for high-resolution imaging and nanoscale manipulation, combining imaging with controlled stimuli to enable in-situ experiments. Applications include imaging nanoparticles in biological systems using the wet STEM detector, and performing electrical and mechanical measurements with the nano-manipulators. The gas injection systems allow for platinum and gold deposition, useful in sample preparation or device modification. The EDS and EBSD detectors enable elemental mapping and crystallographic characterization, respectively. The variable pressure capability makes it suitable for imaging non-conductive or outgassing samples.^[1]

Imaging of nanoparticles in biological systems
In-situ electron microscopy development
Chemical characterization via spectra, element mapping, or phase mapping
Characterization of crystallographic structures
Nanoscale manipulation and correlated response experiments

What do the numbers mean?

Power & electrical1

Micro-droplet injection system: Included for electrical and mechanical measurements^[1]

Vacuum & pumping2

Operating pressure range: 6 x 10^-4 Pa to ~1000 Pa^[1]
Pressure range: 6 x 10^-4 Pa to ~1000 Pa^[1]

Gas & chemistry2

Gas injection systems: For platinum and gold e-beam deposition^[1]
Gas injection systems: Platinum and gold e-beam deposition^[1]

Optics & imaging6

Resolution in ESEM mode: 1.5 nm^[1]
Detector: Special wet STEM detector^[1]
EBSD: Electron backscatter diffraction detector available^[1]
Resolution (ESEM mode): 1.5 nm^[1]
Wet STEM detector: Present^[1]
EBSD (Electron backscatter diffraction detector): Present^[1]

Configuration & options7

Heating and cooling stage temperature range: 20-1000°C^[1]
Manipulators: Dual Kleindiek nano-manipulators^[1]
EDS: EDAX Energy Dispersive x-ray spectrometer^[1]
Temperature range (heating/cooling stages): 20-1000°C^[1]
Dual Kleindiek nano-manipulators: Present^[1]
Micro-droplet injection system: Present^[1]
EDS (Energy Dispersive x-ray spectrometer): EDAX^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
Quanta 600 FEG Mark II Environmental Scanning Electron Microscope	—	—	—	nano.upenn.edu^[1]

Interested in this tool?

Need help with this tool?Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Operating pressure range6 x 10^-4 Pa to ~1000 Pa^[1]
Micro-droplet injection systemIncluded for electrical and mechanical measurements^[1]
Gas injection systemsFor platinum and gold e-beam deposition^[1]
Pressure range6 x 10^-4 Pa to ~1000 Pa^[1]
Gas injection systemsPlatinum and gold e-beam deposition^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What is the resolution of the Quanta 600 FEG in ESEM mode?

The Quanta 600 FEG achieves 1.5 nm resolution in ESEM mode.^[1]

What temperature range is supported for imaging?

Heating and cooling stages allow imaging from 20 to 1000°C.^[1]

What detectors are available for chemical and crystallographic analysis?

An EDAX energy dispersive X-ray spectrometer (EDS) is available for chemical characterization, and an electron backscatter diffraction detector (EBSD) is available for crystallographic structures.^[1]

What are the in-situ capabilities for nanoscale manipulation?

The system includes dual Kleindiek nano-manipulators with a micro-droplet injection system for electrical and mechanical measurements, and gas injection systems for platinum and gold electron-beam deposition.^[1]

Not publicly documented

The following facts about the Quanta 600 FEG are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Quanta 600 FEG are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Quanta 600 FEG are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Quanta 600 FEG are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Quanta 600 FEG is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Quanta 600 FEG are on record.
Answerable by: an OEM parts catalog or a service engineer