EV Group

6200 Mask

Research Quality: 50% complete

The EV Group 6200 Mask is a lithography tool configured for 6-inch and 8-inch wafers. The EV Group 6200 Mask includes 3 stations. The EV Group 6200 Mask includes backside alignment, top view alignment, and 5x optics.^[1]^[2]

6200 Mask — Inventory photo — Fig. 016200 MaskInventory photo^[1]

Performance

Backside alignment; top view alignment^[1]

Optics

Mask Aligner^[1]

What it is

The EV Group 6200 is a mask aligner configured for 6-inch and 8-inch wafers.^[1]^[2]

How it works

The EV Group 6200 has three stations: a 6-inch chuck with mask holder, an 8-inch chuck with mask holder, and a 1000W light source.^[1]^[2]

The machine supports backside alignment and top view alignment with 5x optics.^[1]^[2]

Where it fits in the process flow

General reference — not yet source-verified

Mask aligners are used in the lithography step of wafer fabrication, after photoresist coating and before development.

Applications

General reference — not yet source-verified

Backside alignment capability enables double-sided patterning, which is useful for MEMS devices such as pressure sensors and microfluidics.

What do the numbers mean?

Wafer handling4

6" Chuck + Mask holder^[1]; 8" Chuck + Mask holder^[1]
Wafer sizes: 6, 8 inch^[1]
Wafer handling: 6" Chuck + Mask holder; 8" Chuck + Mask holder^[2]

Optics & imaging3

Backside alignment, top view alignment, optic 5x^[1]
Tool type: Mask Aligner^[1]
Optics: 5x^[1]

Performance1

Alignment: Backside alignment; top view alignment^[1]

Configuration & options6

3 Stations:^[1]
Power: 1000W light source^[1]
Manufacturer: EV Group^[1]
Model: 6200^[1]
Stations: 3 Stations^[1]
Light source: 1000W light source^[1]

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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What wafer sizes does the EVG 6200 support?

The EVG 6200 supports 6-inch and 8-inch wafers.^[1]^[2]

Does the EVG 6200 support backside alignment?

Yes, the EVG 6200 includes backside alignment capability.^[1]^[2]

What is the power of the light source in the EVG 6200?

The EVG 6200 uses a 1000W light source.^[1]^[2]

How many stations does the EVG 6200 have?

The EVG 6200 has three stations.^[1]^[2]

What magnification is used for top view alignment on the EVG 6200?

The EVG 6200 uses 5x optics for top view alignment.^[1]^[2]

Not publicly documented

The following facts about the 6200 Mask are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 6200 Mask are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 6200 Mask are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 6200 Mask are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 6200 Mask are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 6200 Mask is not on record.
Answerable by: an OEM datasheet or a fab qualification report