Waferpedia

Disco

DTG 8460 Wafer Backside

Dicing & GrindingDisco DTG 8460 family
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DTG 8460 Wafer Backside — Inventory photo
Fig. 01DTG 8460 Wafer BacksideInventory photo[1]

What it is

General reference — not yet source-verified

The Disco DTG 8460 Wafer Backside is a dicing and grinding machine for wafer backside processing.

How it works

The DTG 8460 includes a DTU 1550.[1][2]

Where it fits in the process flow

General reference — not yet source-verified

Wafer backside grinding belongs in back-end or post-front-end wafer processing, where wafer thickness control and backside preparation support later dicing and assembly operations.

Applications

General reference — not yet source-verified

Wafer backside grinding is used in semiconductor manufacturing for wafer thinning and backside preparation before downstream singulation and packaging.

What do the numbers mean?

Wafer handling6

Chuck table for 12
, and 8" is possible[1]
Accurate?
Robot picker for 12", and 8" is possible[1]
Accurate?
Machine type
Wafer backside grinder[1]
Accurate?
Wafer size
12 inch[1]
Accurate?
Chuck table
For 12", and 8" is possible[1]
Accurate?
Robot picker
For 12", and 8" is possible[1]
Accurate?

Dimensions & facilities2

Each spindle has 2 height gauge
inner and outer mechanical IPG (in-line process gauge) on Z1 and Z2 spindles respectively[1]
Accurate?
Height gauge
Each spindle has 2 height gauge: inner and outer mechanical IPG (in-line process gauge) on Z1 and Z2 spindles respectively[1]
Accurate?

Configuration & options4

Includes DTU 1550[1]
Accurate?
Spinner table for 12", and 8" is possible[1]
Accurate?
Accessory
Includes DTU 1550[1]
Accurate?
Spinner table
For 12", and 8" is possible[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the DTG 8460 Wafer Backside are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DTG 8460 Wafer Backside are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the DTG 8460 Wafer Backside are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the DTG 8460 Wafer Backside are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the DTG 8460 Wafer Backside are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the DTG 8460 Wafer Backside is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]DTG 8460 Wafer Backside — Disco | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 4, 2026.

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