CEE

Apogee 450 Spin

Q: What substrate sizes does the Apogee 450 handle?

The Apogee 450 handles substrates up to 450 mm round or 14 inch by 14 inch square.

Q: What is the maximum spin speed of the Apogee 450?

The Apogee 450 has a maximum spin speed of 6,000 rpm.

Q: What acceleration is specified for the Apogee 450?

The Apogee 450 is specified at up to 30,000 rpm/s unloaded.

Q: What interface does the Apogee 450 use for recipe control?

The Apogee 450 uses a 7-inch full-color touchscreen interface and supports unlimited recipes with unlimited steps.

Q: What utility requirements are given for the benchtop model?

The benchtop Apogee 450 is specified for 208-230 VAC power, 6 A maximum current, a 3/4 inch OD drain port, a 1.5 inch OD exhaust port, and 1/4 inch push-to-connect vacuum with nitrogen or CDA for automated dispense.

CEE Apogee family

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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The CEE Apogee 450 Spin is a spin coater for large substrates. The CEE Apogee 450 Spin supports wafers up to 450 mm round and square substrates up to 14" x 14". The CEE Apogee 450 Spin has a maximum spin speed of 6,000 rpm.^[1]^[2]^[3]

Apogee 450 Spin — Inventory photo — Fig. 01Apogee 450 SpinInventory photo^[4]

Power

208-240 V^[4]

Vacuum

1/4" push to connect, <33 kPa abs^[2]

Performance

0.2 rpm^[2]

Optics

< 0.2 rpm/s^[2]

What it is

The CEE Apogee 450 Spin is a spin coater for semiconductor and advanced materials processing. The Apogee 450 Spin Coater is configured for substrates up to 450 mm round or 14 inch by 14 inch square.^[4]^[2]^[1]^[3]

How it works

The Apogee 450 uses an indirect-drive, brushless-motor architecture. The Apogee 450 includes a touchscreen interface, programmable recipes, and a DataStream operating system for monitoring and managing process parameters.^[2]^[1]^[3]^[5]

The Apogee 450 supports automated and manual dispense modes. The Apogee 450 also supports vacuum holding, lid interlocks, and exhaust and drain features for handling process fluids and fumes.^[2]^[1]^[3]^[5]

What do the numbers mean?

Power & electrical4

208-240 V^[4]; Single Phase^[4]; 50/60 Hz^[4]
Voltage: 208-230 VAC^[2]

Vacuum & pumping4

Exhaust port: 1.5" OD, 0.4” H2O @ 30 CFM (100 Pa @ 50 CMH)^[2]
Vacuum: 1/4" push to connect, <33 kPa abs^[2]
Automated dispense gas: N2/CDA, 70 psi (482 kPa)^[2]
Vacuum and lid interlock: Yes^[5]

Wafer handling2

Wafer sizes: 6, 8, 12 inch^[4]
Max substrate size: 450 mm round or 14" x 14" square^[2]

Optics & imaging3

Acceleration resolution: < 0.2 rpm/s^[2]
Spin speed resolution: 0.2 rpm^[2]
Step time resolution: 0.1 s^[2]

Performance1

Spin speed repeatability: 0.2 rpm^[2]

Control & software3

GUI: 7-inch full-color touchscreen^[2]
Number of recipes: Unlimited^[2]
Interface: USB 2.0, Ethernet, StreamSync™ communication protocol^[5]

Dimensions & facilities1

Weight: 85 lb (38.6 kg)^[2]

Configuration & options7

Model: Apogee 450^[4]
Equipment type: Spin coater^[4]
Max spin speed: 6,000 rpm^[2]
Max acceleration: 30,000 rpm/s^[2]
Drain port: 3/4" OD^[2]
Full load current: 6A (max)^[2]
Chamber material: HDPE spin bowl^[5]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Configuration208-240 V^[4]
ConfigurationSingle Phase^[4]
Configuration50/60 Hz^[4]
Voltage208-230 VAC^[2]
Exhaust port1.5" OD, 0.4” H2O @ 30 CFM (100 Pa @ 50 CMH)^[2]
Vacuum1/4" push to connect, <33 kPa abs^[2]
Automated dispense gasN2/CDA, 70 psi (482 kPa)^[2]
Vacuum and lid interlockYes^[5]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What substrate sizes does the Apogee 450 handle?

The Apogee 450 handles substrates up to 450 mm round or 14 inch by 14 inch square.^[4]^[2]^[1]^[3]

What is the maximum spin speed of the Apogee 450?

The Apogee 450 has a maximum spin speed of 6,000 rpm.^[2]^[1]^[3]

What acceleration is specified for the Apogee 450?

The Apogee 450 is specified at up to 30,000 rpm/s unloaded.^[2]^[1]^[3]

What interface does the Apogee 450 use for recipe control?

The Apogee 450 uses a 7-inch full-color touchscreen interface and supports unlimited recipes with unlimited steps.^[2]^[1]^[3]

What utility requirements are given for the benchtop model?

The benchtop Apogee 450 is specified for 208-230 VAC power, 6 A maximum current, a 3/4 inch OD drain port, a 1.5 inch OD exhaust port, and 1/4 inch push-to-connect vacuum with nitrogen or CDA for automated dispense.^[1]^[3]

Not publicly documented

The following facts about the Apogee 450 Spin are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Apogee 450 Spin are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Apogee 450 Spin are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Apogee 450 Spin are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Apogee 450 Spin are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Apogee 450 Spin is not on record.
Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (5)Every fact above is drawn from these public sources

[1]Apogee 450 Spin Coater - Benchtop - Cost Effective Equipment — costeffectiveequipment.comcosteffectiveequipment.com
[2]costeffectiveequipment.com — costeffectiveequipment.comcosteffectiveequipment.com
[3]CEE Apogee 450 Spin Coater, Up To 450mm | SiSTEM — sistemtechnology.comsistemtechnology.com
[4]Inventory photo
[5]instrumenthive.com — instrumenthive.cominstrumenthive.com