Canon
FPA 3000 i 5
The Canon FPA 3000 i 5 is a stepper for semiconductor wafer processing. The FPA 3000 i 5 + variant supports 8-inch wafers with notch alignment and L-type transfer. The FPA 3000 i 5 + runs software version V13.06B.06.[1]
What it is
How it works
General reference — not yet source-verifiedA lithography stepper projects a patterned mask image onto a photosensitive wafer surface in repeated fields.
Where it fits in the process flow
General reference — not yet source-verifiedA lithography stepper sits in the pattern transfer stage of semiconductor front end processing.
Applications
General reference — not yet source-verifiedA lithography stepper is used to form circuit patterns on photoresist-coated semiconductor wafers.
What do the numbers mean?
Wafer handling7
Optics & imaging2
Control & software1
Configuration & options6
- Rasco TBW-CD-83 + Compact Chamber[2]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| FPA 3000 i 5 + | — | — | Intended for 8-inch wafers with notch alignment and L-type transfer; uses Canon's reticle cassette; no additional reticle library; no PPC unit; software version V13.06B.06; some units include a Rasco TBW-CD-83 transfer module with Compact Chamber (2000 vintage). | Equipment inventory listing[1] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the FPA 3000 i 5 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the FPA 3000 i 5 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the FPA 3000 i 5 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the FPA 3000 i 5 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the FPA 3000 i 5 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the FPA 3000 i 5 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Equipment inventory listing
- [4]Equipment inventory listing
Last updated Oct 7, 2026.
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