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Bruker

Dektak 6 M Surface

Metrology & InspectionBruker Dektak 6 M Surface family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Bruker Dektak 6 M Surface is a contact profilometer. The Bruker Dektak 6 M Surface measures the thickness of patterned thin films by sensing the deflections of a fine stylus riding over feature steps. The Bruker Dektak 6 M Surface supports substrates ranging from 150 mm diameter wafers down to small pieces.[1]

Dektak 6 M Surface — Inventory photo
Fig. 01Dektak 6 M SurfaceInventory photo[2]

What it is

The Bruker Dektak 6M, also branded as Veeco Dektak 6M, is a contact profilometer. The Dektak 6M is a semi-manual instrument designed for surface metrology.[2][3][1]

How it works

The Dektak 6M measures surface profiles by moving a sample horizontally beneath a stylus while the stylus maintains contact with the surface. The instrument senses the vertical deflections of the stylus and records them to generate a topographic profile of the sample.[3][1]

Where it fits in the process flow

General reference — not yet source-verified

Profilometry is typically performed after critical processing steps such as deposition, etching, or chemical-mechanical planarization to verify feature dimensions. The measurements provide feedback for process control and tool qualification.

Applications

Typical applications of the Dektak 6M include measurement of surface roughness, step heights, and film thickness. The instrument can characterize hard materials such as silicon, silicon oxide, silicon nitride, and metal films, as well as soft materials like photoresists and polymers.[3][1]

What do the numbers mean?

Wafer handling1

Maximum wafer diameter
150 mm (6 in)[1]
Accurate?

Optics & imaging3

Detectable depth range
1 mm down to 5 nm[1]
Accurate?
Vertical resolution
0.1 nm[1]
Accurate?
Point-to-point resolution
1 angstrom[3]
Accurate?

Dimensions & facilities1

Maximum step height
1 mm[1]
Accurate?

Configuration & options7

Instrument type
contact profilometer[1]
Accurate?
Measurement principle
sensing the deflections of a fine stylus riding over feature steps[1]
Accurate?
Scan length
50 µm to 30 mm[1]
Accurate?
Stylus force
9.8 mN to 147 mN (1 mgf to 15 mgf)[1]
Accurate?
Small pieces supported
Yes[1]
Accurate?
Maximum thickness
31 mm[1]
Accurate?
Stylus tip radius
12 micrometers[3]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the maximum step height the Dektak 6M can measure?

The maximum step height is 1 mm.[3][1]

What is the vertical resolution of the Dektak 6M?

The vertical resolution is 0.1 nm.[1]

What is the stylus force range for the Dektak 6M?

The stylus force ranges from 9.8 mN to 147 mN (1 mgf to 15 mgf).[1]

Not publicly documented

The following facts about the Dektak 6 M Surface are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Dektak 6 M Surface are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Dektak 6 M Surface are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Dektak 6 M Surface are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Dektak 6 M Surface are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Dektak 6 M Surface is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]nist.gov — nist.govnist.gov
  2. [2]Inventory photo
  3. [3]nist.gov — nist.govnist.gov
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Last updated Sep 26, 2026.

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