Axcelis
M 150 PC UV
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
General reference — not yet source-verifiedUV cure systems typically consist of a UV light source, a reflective chamber, a wafer stage, and a control system. Wafers are exposed to UV radiation at controlled intensity and temperature, often in an inert atmosphere to prevent oxidation. The UV radiation initiates photochemical reactions to cure or crosslink materials on the wafer surface.
Applications
General reference — not yet source-verifiedCommon applications of UV cure systems include curing of spin-on dielectrics, photoresist hardening, low-temperature annealing of thin films, and surface treatments. UV cure systems are also used in advanced packaging and MEMS fabrication.
What do the numbers mean?
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the M 150 PC UV are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the M 150 PC UV are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the M 150 PC UV are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the M 150 PC UV are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the M 150 PC UV are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the M 150 PC UV is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]inventory listing
- [4]waferpedia.com — waferpedia.comwaferpedia.com
- [5]Axcelis M 150 PC UV family | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 10, 2026.
Compare with similar tools
View all →The Blue M 0 500 is an oven manufactured by Blue M, with asset number 139866.
