Waferpedia

Comparison ledger

M 150 PC UVversus0 500

Axcelis M 150 PC UV, Blue M 0 500, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 500Blue M
OEMAxcelisBlue M
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAxcelis M 150 PC UVBlue M 0 500
Specifications
ConfigurationDoes not include boards[1]—
MakeAxcelis[1]—
ModelM 150 PC[1]0 500[3]
Equipment typeUV Cure System[2]Oven[3]
Wafer size6 inch[1]—
Vintage2001 Vintage[1]—
Does not include boardsDoes not include boards[2]—
Wafer Sizes6 inch[1]—
CategoryThermal / Diffusion[2]—
Manufacturer—Blue M[3]
Asset number—139866[3]
Last confirm date—September 10, 2025[3]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing