Waferpedia

Agilent

E 500

Ion ImplantationAgilent E 500 family
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The Agilent E 500 is an 8-inch medium current ion implanter. The Agilent E 500 is categorized under ion implantation equipment.[1][2]

AgilentE 500
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What it is

The Agilent E 500 is an ion implantation tool for semiconductor manufacturing.[3][1][2]

The Agilent E 500 is a medium current implanter for 8-inch wafers.[3][1][2]

How it works

General reference — not yet source-verified

Ion implanters accelerate dopant ions into a wafer surface to introduce controlled impurity concentrations.

A medium current implanter is used for implantation steps that require a balance between beam current and dose control.

Where it fits in the process flow

General reference — not yet source-verified

Ion implantation follows pattern definition steps and precedes thermal processing used to activate and redistribute dopants.

The Agilent E 500 fits into doping and junction formation steps in the front end of semiconductor device fabrication.

Applications

The Agilent E 500 is used for semiconductor doping by ion implantation.[1][2]

The Agilent E 500 is suitable for process flows that use medium current implantation on 8-inch wafers.[3][1][2]

What do the numbers mean?

Wafer handling1

Wafer size
8 inch[3]
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Configuration & options5

Medium Current[3]
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Manufacturer
Agilent[1]
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Category
Ion Implantation[1]
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Type
Medium current ion implanter[1]
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Vintage
1996 vintage[3]
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Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
E 500 EHPI—2003Medium current ion implanter for 8-inch wafers.waferpedia.com[2]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of tool is the Agilent E 500?

The Agilent E 500 is an ion implantation tool.[3][1][2]

What implantation class does the Agilent E 500 belong to?

The Agilent E 500 is a medium current ion implanter.[3][1][2]

What wafer size does the Agilent E 500 process?

The Agilent E 500 processes 8-inch wafers.[3][1][2]

Not publicly documented

The following facts about the E 500 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the E 500 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the E 500 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the E 500 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the E 500 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the E 500 are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.com — waferpedia.comwaferpedia.com
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]inventory listing
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Last updated Oct 4, 2026.

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