Varian EHPI 500

Models in this family

1. 

   EHPI 500

   The Varian EHPi 500 is a medium current ion implanter offering an energy range of 5–260 keV (X+) and capable of handling wafer sizes up to 200 mm for features down to 0.18 µm.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   EHPi-220	—	—	Listed alongside the EHPi-500 as a medium current ion implanter model.	web.archive.org[1]
   EHPi-500	—	—	Described as having a wider energy range up to 780 keV, 10% higher maximum throughputs, and new statistical process monitoring capabilities.	web.archive.org[1]

2. 

   EHPI 500 Medium Current

   The Varian EHPI 500 Medium Current is a medium-current ion implanter.

Sources