Waferpedia

Tool family

Varian E 500 EHPI Ion Implant

VarianIon Implantation1 entry

Varian E 500 EHPI Ion Implant System.

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Models in this family

  1. E 500 EHPI Ion Implantproduced 2000–

    Varian E 500 EHPI Ion Implant System is a 6-inch wafer ion implant system with a Windows 7 control computer and V15.10.12 software.