Waferpedia
Waferpedia
/
Ulvac
/
Ulvac CME 200 J
Tool family
Ulvac CME 200 J
Ulvac
·
Deposition
·
1 entry
LinkedIn
X
Email
Copy link
Models in this family
CME 200 J
The Ulvac CME 200 J is a plasma-enhanced chemical vapor deposition (PECVD) system.