Tokyo Electron Clean Track ACT 8 Multi Block

Models in this family

1. Clean Track ACT 8 Multi Block

   The TEL Clean Track ACT 8 Multi Block is a photoresist spin-coater and developer used in semiconductor manufacturing.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   ACT8 Multi Block 3C/3D	—	—	Described as a specific configuration of the ACT8 Multi Block currently running in production	macquarie.com[1]

Sources