Waferpedia
Waferpedia
/
Tokyo Electron
/
Tokyo Electron Alpha 801 D
Tool family
Tokyo Electron Alpha 801 D
Tokyo Electron
·
Thermal / Diffusion
·
1 entry
LinkedIn
X
Email
Copy link
Models in this family
Alpha 801 D
The Tel Alpha 801 D is a furnace supporting 8-inch wafers.