Tool family
Tokyo Electron Act 12
Tokyo Electron2 entries
Models in this family
The Tel Act 12 is a coater/developer system for semiconductor wafer processing.
Tokyo Electron Act 12 DUV Photoresist Coater / Developer Track is a deep ultraviolet wafer-processing system with a right-to-left wafer flow and 300mm wafer setup.
All entries
- Act 12Tokyo Electron
The Tel Act 12 is a coater/developer system for semiconductor wafer processing.
22 specs - Act 12 DUV Photoresist Coater Developer TrackTokyo Electron
Tokyo Electron Act 12 DUV Photoresist Coater / Developer Track is a deep ultraviolet wafer-processing system with a right-to-left wafer flow and 300mm wafer setup.
CategoryResist ProcessingWaferThe direction of wafer flow is right to left35 specs