Waferpedia

Tool family

Plasma-Therm 210RL-B

Plasma-ThermEtch1 entry

The Plasma-Therm 210RL-B is a reactive ion etcher (RIE) tool used for dry etching processes.

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Models in this family

  1. 210RL-B

    The Plasma-Therm 210RL-B is a reactive ion etcher (RIE) tool used for dry etching processes.