Waferpedia

Tool family

Oxford Instruments Ion Beam

Oxford InstrumentsDeposition2 entries
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Models in this family

  1. Ion Beam

    The Oxford Ion Beam Deposition System is a deposition tool using DC hot wire filament ion-guns.

  2. Ion Beam 300

All entries

  1. Ion BeamOxford Instruments

    The Oxford Ion Beam Deposition System is a deposition tool using DC hot wire filament ion-guns.

    CategoryDeposition
    10 specs
  2. Ion Beam 300Oxford Instruments
    CategoryEtch
    4 specs