Waferpedia

Tool family

Lam Research IPEC

Lam ResearchCMP3 entries
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Models in this family

  1. IPEC AvantGaard 776

    The Lam / IPEC AvantGaard 776 is an 8-inch chemical mechanical polisher (CMP) available in dielectric and tungsten configurations.

    Cited variants

    DesignationGenerationVintageChangesSource
    IPEC AvantGaard 776 Tungsten——Configured for tungsten applications.waferpedia.com[1]
    IPEC AvantGaard 776 (Dielectric)——Dielectric configuration.Equipment inventory listing[2]
  2. IPEC Avanti 472

    The Lam / IPEC Avanti 472 is a CMP (Chemical Mechanical Polisher) described as a fully automated single-wafer system for 4" to 8" wafers.

  3. IPEC Momentum

All entries

  1. IPEC AvantGaard 776Lam Research

    The Lam / IPEC AvantGaard 776 is an 8-inch chemical mechanical polisher (CMP) available in dielectric and tungsten configurations.

    CategoryCMP
    9 specs
  2. IPEC Avanti 472Lam Research

    The Lam / IPEC Avanti 472 is a CMP (Chemical Mechanical Polisher) described as a fully automated single-wafer system for 4" to 8" wafers.

    CategoryCMPWaferSingle wafer
    3 specs
  3. IPEC MomentumLam Research
    CategoryCMP
    1 spec

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing