KLA Surfscan

Models in this family

1. 

   Surfscan 5500 Particle Defect

   The KLA Surfscan 5500 is a particle defect detection system for semiconductor wafers.

2. 

   Surfscan 6100 Wafer

   The KLA Surfscan 6100 is a wafer inspection system that uses a 632 nm HeNe red laser to detect particles down to 0.16 micron on bare silicon.

3. 

   Surfscan 7600 Particle Defect
4. 

   Surfscan 7700 Particle Defect

   The KLA Surfscan 7700 is a particle defect inspection system.

5. 

   Surfscan AIT 8010 Particle Defect

   The KLA Surfscan AIT 8010 Particle Defect System is a particle defect inspection system with software version 3.3.2.813 and SECS/GEM CIM.

6. Surfscan SP 1

   The KLA Surfscan SP 1 is a wafer inspection tool from KLA-Tencor used for defect detection and surface quality inspection on polished wafers, epi wafers, and engineered substrates.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Surfscan SP 1 TBi	—	—	—	Equipment inventory listing[1]

7. 

   Surfscan SP 1 Classic
8. 

   Surfscan SP 1 Classic Centering Ring

   The KLA Surfscan SP 1 Classic Centering Ring is a metrology and inspection item associated with the Surfscan SP 1 Classic model.

9. 

   Surfscan SP 1 Classic Particle Defect

   The KLA Surfscan SP 1 Classic Particle Defect System is a particle defect inspection system for 6-inch and 8-inch wafers.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Surfscan SP1	KLA Surfscan	—	—	waferpedia.com[2]

10. 

    Surfscan SP 1 DLS

    The KLA Surfscan SP1 DLS is an unpatterned surface inspection system for defect detection on polished wafers, epi wafers, and engineered substrates.

11. 

    Surfscan SP 1 DLS Centering Ring

    The KLA Surfscan SP 1 DLS Centering Ring is a KLA component for the Surfscan SP 1 DLS unpatterned surface inspection system.

12. 

    Surfscan SP 1 DLS Particle Defect

    The KLA Surfscan SP 1 DLS Particle Defect System is a wafer inspection tool cited in sources with 8-inch, 12-inch, and 300mm configurations.

    Cited variants

    Designation	Generation	Vintage	Changes	Source
    Surfscan SP 1 DLS Particle Defect System, 12 inch	—	2002	Listed as a 12-inch configuration with FOUP handler; one source describes it as non-operational, another notes Windows NT, two loadports, and input current details.	Equipment inventory listing[3]
    Surfscan SP 1 DLS Particle Defect System, 8 inch	—	2009	Listed as an 8-inch configuration with a single-station FOUP handler and missing analog boards x2 and DC distribution board.	Equipment inventory listing[4]

13. 

    Surfscan SP 1 Particle Defect

    The KLA Surfscan SP 1 is a particle defect system used for detecting defects on semiconductor wafers, with support for wafers up to 12 inches in diameter.

14. 

    Surfscan SP 1 TBI

    KLA Surfscan SP 1 TBI is an unpatterned wafer inspection system with triple-beam illumination and brightfield capability.

    Cited variants

    Designation	Generation	Vintage	Changes	Source
    Surfscan SP1	—	—	SP1 is an unpatterned wafer inspection system with proprietary Stationary Beam Technology and an optional brightfield channel based on Nomarski differential interference contrast technology.	web.archive.org[5]

15. 

    Surfscan SP 1 TBI Centering Ring
16. Surfscan SP 1 TBI Exchange
17. 

    Surfscan SP 1 TBI Keyboard

    The KLA Surfscan SP 1 TBI Keyboard is a keyboard-only replacement part for the KLA Surfscan SP 1 TBI system.

18. 

    Surfscan SP 1 TBI Particle Defect

    The KLA Surfscan SP 1 TBI is a particle defect system for wafer inspection, with configurations supporting 8-inch and 12-inch wafers.

19. 

    Surfscan SP 1 TBI Particle Measurement

    The KLA Surfscan SP 1 TBI is a particle measurement tool for 8-inch wafers.

20. 

    Surfscan SP 2
21. 

    Surfscan SP 2 Particle Defect

    The KLA Surfscan SP 2 is a particle defect inspection system for semiconductor wafers.

22. 

    Surfscan SP 3 Particle Defectproduced 2011–

    The KLA Surfscan SP 3 Particle Defect System is a bare wafer inspection station for 12-inch wafers with DUV illumination.

23. Surfscan SP 5 Particle Defect

    The KLA Surfscan SP 5 Particle Defect System is a bare wafer inspection station configured for 12-inch wafers.

Sources