KLA eDR

Models in this family

1. 

   eDR 5200 +

   KLA eDR 5200 + is a defect review scanning electron microscope in the metrology and inspection category.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   eDR-5200 PLUS	—	2009	described as a defect review SEM with defect classification capability; listed as 300 mm	fabsurplus.com[1]

2. 

   eDR 5210 DR-SEM

   The KLA eDR 5210 DR-SEM is a defect review scanning electron microscope.

Sources