KLA AIT Patterned Wafer

Models in this family

1. 

   AIT Patterned Wafer

   The KLA AIT is a patterned wafer inspection system designed for defect detection on 200 mm wafers.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   AIT I	—	—	—	classoneequipment.com[1]
   AIT II	—	—	—	classoneequipment.com[1]
   AIT XP	—	—	—	classoneequipment.com[1]
   AIT UV	—	—	—	classoneequipment.com[1]

Sources