Waferpedia

Tool family

CEE 300 Bake Plate

Models in this family

  1. The CEE Apogee 300 Bake Plate is a semiconductor wafer bake plate for up to 300mm wafers with recipe-controlled thermal processing and DataStream™ logging.

    Cited variants

    DesignationGenerationVintageChangesSource
    Apogee Benchtop 300 Bake Plate——Benchtop configurationcosteffectiveequipment.com[1]
    Apogee Flange Mount 300 Bake Plate——Flange/deck-mountable configurationcosteffectiveequipment.com[1]
    Apogee X-Pro 300 Bake Plate——X-Pro platform for use with X-Pro II Workstationcosteffectiveequipment.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]costeffectiveequipment.comcosteffectiveequipment.com