Waferpedia

Tool family

Applied Materials Enabler

Models in this family

  1. Applied Materials Enabler is a dielectric etch tool configured for 300 mm wafers.

    Cited variants

    DesignationGenerationVintageChangesSource
    Centura AP Enabler E5—2010Described as a dielectric etcher with 4 process chambers and a 300 mm version.fabsurplus.com[1]
    Centura AP Enabler FEOL-E5——Identified as the front end E5 Enabler chamber in source material.semistarcorp.com[2]

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]fabsurplus.comfabsurplus.com
  2. [2]semistarcorp.comsemistarcorp.com