Comparison ledger
KLA .204 PSL Wafer, Micro-Vu 311 HM Automated Precision Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | Micro-Vu |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Micro-Vu 311 HM Automated Precision Measurement |
| Specifications | ||
| Configuration | NIST Traceable[1] | 10kg - Scale Resolution: 031 um - XY Accuracy, E2: 2.6+L/175 - Z Accuracy, E1: 3.0+L/150 - Zoom Range: 19.5.1 or 36:1[3] |
| Wafer Size | 8 inch[1] | — |
| Traceability | NIST[2] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[1] | — |
| Measurement Capacity | — | 315 x 315 x 160mm,[3] |
| Viewed Magnification | — | 20x-390x / 15x-540x[3] |
| Scale resolution | — | 031 um[3] |
| XY accuracy, E2 | — | 2.6+L/175[3] |
| Z accuracy, E1 | — | 3.0+L/150[3] |
| Zoom range | — | 19.5.1 or 36:1[3] |
| Includes | — | accessories[3] |
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