Comparison ledger
Brooks 017-0024-01 Prealigner, CEE 100, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0024-01 PrealignerBrooks | 100CEE |
|---|---|---|
| OEM | Brooks | CEE |
| Category | Lithography | Lithography |
| Wafer size | — | 6" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0024-01 Prealigner | CEE 100 |
| Cited variants | — |
|
| Specifications | ||
| Tool type | — | Spray Developer[1] |
| Accepts wafer size | — | up to 6" wafers[2] |
| Programmable programs | — | 10 programs[2] |
| Steps per program | — | up to 10 steps[2] |
| Programmable step parameters | — | Acceleration, Speed, Time[2] |
| Associated document | — | CEE Model 100CB Spinner.doc[2] |
| Wafer size | — | Up to 6 inches[2] |
| Programs | — | 10 programs each with up to 10 steps[2] |
| Control parameters | — | Acceleration, Speed, Time[2] |
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