Comparison ledger
Axcelis 200 ACU, Lam Research 590, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | 590Lam Research |
|---|---|---|
| OEM | Axcelis | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Lam Research 590 |
| Specifications | ||
| Configuration | Parts Machine[1] | — |
| Manufacturer | Axcelis[1] | — |
| Model | 200 ACU[1] | 590[5] |
| Tool type | Asher[1] | — |
| Wafer size | 200mm[3] | 6 inch[5] |
| Serial number | AU6A356AH[3] | — |
| Computer system | M 200 PC, M 200[4] | — |
| Part number | SC 4572 A[4] | — |
| Volts | 208[4] | — |
| Amps | 30[4] | — |
| Equipment type | Asher[1] | — |
| Wafer configuration | 8 inch[2] | — |
| Voltage | — | 208V[5] |
| RF frequency | — | 13.56 MHz[7] |
| Pressure | — | 2.8 Torr[7] |
| Gap | — | 0.38 cm[7] |
| Power (low) | — | 450 W[7] |
| Power (high) | — | 850 W[7] |
| OEM | — | Lam Research[5] |
| Category | — | Etcher[5] |
| Power | — | 208V[5] |
| Plasma recipe entry | — | CF4+CHF3+He (90:30:120 sccm)[7] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →