Comparison ledger
Axcelis 200 ACU, Hitachi M 712 M 711 Dry Etch Process, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | M 712 M 711 Dry Etch ProcessHitachi |
|---|---|---|
| OEM | Axcelis | Hitachi |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Hitachi M 712 M 711 Dry Etch Process |
| Cited variants | — |
|
| Specifications | ||
| Configuration | Parts Machine[2] | Gaspanel included[6] |
| Manufacturer | Axcelis[2] | — |
| Model | 200 ACU[2] | — |
| Tool type | Asher[2] | — |
| Wafer size | 200mm[4] | 12 inch[6] |
| Serial number | AU6A356AH[4] | — |
| Computer system | M 200 PC, M 200[5] | — |
| Part number | SC 4572 A[5] | — |
| Volts | 208[5] | — |
| Amps | 30[5] | — |
| Equipment type | Asher[2] | — |
| Wafer configuration | 8 inch[3] | — |
| Software revision | — | 1.07 PMv.02.16M[6] |
| ESC Type | — | Bipolar[1] |
| Endpoint type | — | Hitachi EPD monitor ePMv02.16M[1] |
| TMP | — | SHIMAZU EC TMP[1] |
| TMP controller | — | 3203LMC-K1 EC TMP Controller[1] |
| Source generator | — | DAIHEN ES7-IIA EC Source generator[1] |
| Bias generator | — | PEARL CF-500-400K EC Bias generator[1] |
| Gas configuration | — | Line / EC1 / Strip - 1 / Ar - 2 / C12 - 3 / SF6 - 4 / HBr - 5 / CF3 - 6 / CH4 - 7 / NF3 - 8 / O2 - 9 / N2 - 10/ SF6 - 11/ C12 - 12/ O2[1] |
| Gas panel included | — | Yes[6] |
| Vintage | — | 2006[6] |
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