YES
5TA
The YES-5TA is a Vacuum Bake/Vapor Prime system from Yield Engineering Systems. The YES-5TA provides a "one stop" environment for pre-programmed dehydration and vapor deposition of a priming agent.[1]
Wafer size
4-inch wafers; 5-6-inch wafers; 8-inch wafers; 12-inch wafers
Produced
1980–
Power
14A[2]
Performance
2 full loads/hr.[1]
What it is
How it works
Vacuum bake and vapor prime systems provide a pre-programmed dehydration and vapor deposition environment for a priming agent. The batch process uses a heated, evacuated chamber to dry wafers and apply the prime layer.[1]
Applications
The YES 5TA is used for dehydration and vapor priming in semiconductor wafer processing. The system is part of a family that includes vacuum bake and vapor prime equipment for batch wafer handling.[3][1]
- dehydration
- vapor deposition of a priming agent
- vapor prime
What do the numbers mean?
Power & electrical5
Wafer handling9
- capacity
- 8 cassettes of 5-6 in. wafers, or 2 cassettes of 8 in. wafers, or 1 cassette of 12 in. wafers[1]
Performance1
Dimensions & facilities7
Configuration & options2
Vintage & configurations
- 1980Production start[1]
Vacuum Bake / Vapor Prime was the first product YES produced back in 1980.
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes can the YES 5TA handle?
The YES 5TA handles 8 cassettes of 5-inch or 6-inch wafers, 2 cassettes of 8-inch wafers, or 1 cassette of 12-inch wafers.[1]
What is the throughput of the YES 5TA?
The YES 5TA has a throughput of 2 full loads per hour.[1]
Not publicly documented
The following facts about the 5TA are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the 5TA are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 5TA are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 5TA are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 5TA is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 5TA are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]web.archive.org — web.archive.orgweb.archive.org
- [3]Yield Engineering Systems - Products — web.archive.orgweb.archive.org
Last updated Oct 5, 2026.
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