YES

450PB

Thermal / Diffusion 200mm YES 450PB family

Research Quality: 60% complete

The YES 450PB is a high temperature vacuum cure oven series. The YES 450PB Series supports 200 mm wafers. The YES 450PB Series operates up to 450°C.^[1]^[2]

450PB — web.archive.org — Fig. 01450PBweb.archive.org^[1]

Plate 01Video 1 - Yield Engineering Systems (YES) 450PB Polyimide Bake Oven w/PLC Upgrade (ID# SO9591)
ClassOneEngineeringWatch on YouTube
Plate 02Yield Engineering YES 450PB Polymide Bake Oven #60341
Bid ServicellcWatch on YouTube

Wafer size

200mm

Vacuum

MEMS high vacuum cure ovens^[1]

Gas delivery

Up to four process gases^[3]

What it is

The YES 450PB is a high-temperature vacuum cure oven series for MEMS and semiconductor process applications.^[1]^[3]

How it works

The YES 450PB series uses vertical laminar airflow and a cooling package to manage chamber temperature and reduce particle deposition on wafers.^[1]

The YES 450PB series uses a coalescing condensate trap assembly to control solvent condensate accumulation and disposal during curing.^[1]

Where it fits in the process flow

The YES 450PB series fits into wafer cure and anneal steps that follow film coating or other material-preparation processes.^[1]^[2]

The YES 450PB series is used with stainless steel process cassettes that hold wafers vertically to support laminar flow and temperature uniformity in the oven.^[2]

Applications

The YES 450PB series is used for polyimide bake, BCB bake, copper anneal, copper oxide removal, aluminum anneal, and low-k dielectric cure.^[1]

Polyimide bake
BCB bake
Copper anneal
Low-K dielectric cure
Copper oxide removal
Aluminum anneal
Wafer dehydration
Getter activation
Gas desorption
Metal annealing
Thin film resistor thermal treatments
Silane vapor deposition
Moisture removal
Film sealing

What do the numbers mean?

Vacuum & pumping7

Series type: MEMS high vacuum cure ovens^[1]
High vacuum: 10-6^[1]
Pressure range: 50-500 Torr^[3]
Laminar flow pressure range: 0.50-500 Torr^[3]
Equipment type: High vacuum cure oven series^[1]
High vacuum variant: YES-450PB-HV^[1]
High vacuum level: 10-6 Torr^[1]

Wafer handling5

Cassette construction: 316L SST welded, electro-polished construction with no screws or fasteners^[2]
Cassette temperature suitability: 316L SST suitable up to 760°C; recommended continuous operating temperature without distortion is 500°C^[2]
Cassette sizes: 25-wafer cassettes: 2 inch, 3 inch, 100mm, 125mm, 150mm, 150mm short, 200mm, 200mm short, 300mm, and 300mm load port; 13-wafer cassettes: 300 mm and 300mm load port^[2]
Wafer size: 200 mm wafers^[1]
Cassette material: 316L stainless steel, welded and electro-polished construction^[2]

Gas & chemistry1

Process gases: Up to four process gases^[3]

Configuration & options5

Maximum process temperature: Up to 450°C^[1]
Cooling package: Air-only cooling package; no water^[1]
Maximum operating temperature: up to 450°C^[1]
Laminar flow: vertical laminar airflow^[1]
Cooling package: unique cooling package; air-only, no water^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
YES-450PB-HV	—	—	High-vacuum variant designed for complete moisture and hydrogen removal using high vacuum and high temperature.	web.archive.org^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Series typeMEMS high vacuum cure ovens^[1]
High vacuum10-6^[1]
Pressure range50-500 Torr^[3]
Laminar flow pressure range0.50-500 Torr^[3]
Process gasesUp to four process gases^[3]
Equipment typeHigh vacuum cure oven series^[1]
High vacuum variantYES-450PB-HV^[1]
High vacuum level10-6 Torr^[1]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What process families is the YES 450PB series used for?

The YES 450PB series is used for polyimide bake, BCB bake, copper anneal, low-k dielectric cure, copper oxide removal, and aluminum anneal.^[1]

What airflow approach does the YES 450PB series use?

The YES 450PB series uses vertical laminar airflow.^[1]

How does the YES 450PB series handle solvent condensate?

The YES 450PB series uses a coalescing condensate trap assembly to control condensate accumulation and disposal.^[1]

Not publicly documented

The following facts about the 450PB are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 450PB are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 450PB are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 450PB are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 450PB is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 450PB are on record.
Answerable by: an OEM parts catalog or a service engineer