YES
3TA
The YES 3TA is a Vacuum Bake / Vapor Prime system. The YES 3TA is specified for 8 cassettes of 4-inch wafers or 1 cassette of 5-8 inch wafers. The YES 3TA is specified for throughput of 2 full loads per hour.[1][2]
Plate 01Yield Engineering YES-3TA Vapor Prime Oven #58252
Bid ServicellcWatch on YouTubePlate 02Yield Engineering YES-3TA Vapor Prime Oven #58252
Bid ServicellcWatch on YouTube
Wafer size
4 in, 5-6 in, 8 in, 12 in
Produced
1980–
Vacuum
Vacuum Bake / Vapor Prime Systems[3]
Performance
2 full loads/hr[1]
What it is
How it works
The YES 3TA provides a pre-programmed dehydration and vapor deposition environment for a priming agent. The YES 3TA combines vacuum bake functions with vapor priming in a single batch process chamber.[1]
The YES 3TA operates at a maximum temperature of 160 C. The YES 3TA has a capacity of 8 cassettes of 4-inch wafers or 1 cassette of 5-inch to 8-inch wafers.[1]
Where it fits in the process flow
General reference — not yet source-verifiedThe YES 3TA sits ahead of organic coating and other surface-sensitive downstream steps. The YES 3TA is used for dehydration and priming so later process layers can adhere more uniformly.
The YES 3TA is used in batch processing environments where wafer adhesion and surface conditioning matter. The YES 3TA is suitable for flows that need a primed hydrophobic surface before subsequent lithography-related processing.
Applications
The YES 3TA is used for semiconductor wafer dehydration and vapor priming. The YES 3TA is intended for priming agents such as HMDS.[1]
- pre-programmed dehydration
- vapor deposition of a priming agent
What do the numbers mean?
Vacuum & pumping2
Wafer handling3
Performance1
Configuration & options2
Vintage & configurations
- 1980Production start[1]
Vacuum Bake / Vapor Prime was the first product YES produced back in 1980.
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| YES-5TA | — | — | Specified for 8 cassettes of 5-6 inch wafers, or 2 cassettes of 8 inch wafers, or 1 cassette of 12 inch wafers. | web.archive.org[1] |
| YES-15 | — | — | Specified as an 'Ultra-Clean' system with capacity for 8 cassettes of 4 inch wafers, or 1 cassette of 5-8 inch wafers. | web.archive.org[1] |
| YES-6112 | — | — | Specified as an 'Ultra-Clean' system with capacity for 4 cassettes of 8 inch wafers. | web.archive.org[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 3TA are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
The control-system platform and OS era of the 3TA are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 3TA are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 3TA is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 3TA are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the 3TA are on record.
Answerable by: university cleanroom staff or an OEM application specialist
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]Image Reversal Product Specification Chart — web.archive.orgweb.archive.org
- [3]web.archive.org — web.archive.orgweb.archive.org
Last updated Oct 5, 2026.
Compare with similar tools
View all →The Blue M 0 500 is an oven manufactured by Blue M, with asset number 139866.
