YES
253B-2-3CF-2
The MKS Type 253B Exhaust Throttle Valve is a butterfly valve. The MKS Type 253B Exhaust Throttle Valve regulates gas removal from a vacuum chamber when used with an MKS controller. The MKS Type 253B Exhaust Throttle Valve is available with a 15-pin Type "D" connector.[1]
What it is
The MKS Type 253B is a throttling valve used to regulate gas flow in vacuum systems.[1]
How it works
The Type 253B is an exhaust throttle valve, so the valve is placed on the exhaust side of a vacuum system to modulate pumping speed and chamber pressure.[1]
Where it fits in the process flow
The Type 253B belongs in vacuum-process equipment where controlled chamber pressure is needed during operation.[1]
What can it run?
Process applications and technology nodes documented for this tool.
- Vacuum chamber gas removal
- Use with high vacuum pumps
Why won't it start?
Documented failure modes, common issues, and field considerations.
- The manual states that unstable pump performance can occur with high vacuum diffusion pumps if pressure above the oil vapor jet exceeds 0.5 milliTorr.
What do the numbers mean?
Vacuum & pumping4
Dimensions & facilities1
Configuration & options8
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 253B-2-3CF-2 | — | — | CF-flange configuration shown in the manual's dimensions section. | nanofab.utah.edu[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Product nameMKS Type 253B Exhaust Throttle Valve[1]
- Functionregulates the removal of gas from a vacuum chamber; sealing versions can shut off the removal of gas[1]
- Mounting orientationpump label oriented towards the high vacuum pump during installation[1]
- Differential pressure across valve1 atm. (15 psig) max.[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 253B-2-3CF-2 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 253B-2-3CF-2 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 253B-2-3CF-2 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the 253B-2-3CF-2 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 253B-2-3CF-2 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the 253B-2-3CF-2 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]nanofab.utah.edu — nanofab.utah.edunanofab.utah.edu
Last updated Oct 9, 2026.
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