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253B-2-2-2

throttle valveYES 253B-2-2-2 family
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The MKS 253B-2-2-2 is a butterfly exhaust throttle valve that regulates the removal of gas from a vacuum chamber when used with an MKS controller. The MKS 253B-2-2-2 uses an ASA 2" mounting flange with a 1.950" (49.5 mm) inside diameter. The MKS 253B-2-2-2 has a controllable conductance range from 0.70 to 300 l/sec.[1]

YES253B-2-2-2
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Vacuum

1 atm (15 psig) max[1]

Optics

1/10,000[1]

What is it?

The MKS 253B-2-2-2 is a butterfly exhaust throttle valve that regulates gas removal from a vacuum chamber when used with an MKS controller.

What do the numbers mean?

Power & electrical1

Actuator feature
Nonlinear actuator (cosine generator) to linearize valve transfer characteristic[1]
Accurate?

Vacuum & pumping2

Function
Regulates and, in case of sealing valve, shuts off removal of gas from vacuum chamber[1]
Accurate?
Differential pressure across valve
1 atm (15 psig) max[1]
Accurate?

Optics & imaging1

Resolution (standard)
1/10,000[1]
Accurate?

Dimensions & facilities1

Overall height
10.79 inches (274.1 mm)[1]
Accurate?

Configuration & options21

Product type
throttle valve[1]
Accurate?
Valve type
Butterfly valve[1]
Accurate?
Compatible controllers
Type 651, 652, 152G, or 252 (revision D or later)[1]
Accurate?
Mounting flange type
ASA 2"[1]
Accurate?
Inside diameter (A)
1.950 inches (49.5 mm)[1]
Accurate?
Outside diameter (B)
5.95 inches (151 mm)[1]
Accurate?
Thickness (C)
0.75 inches (19.1 mm)[1]
Accurate?
Bolt hole diameter (D)
0.75 inches (19.1 mm)[1]
Accurate?
Bolt circle diameter
4.750 inches (120.7 mm)[1]
Accurate?
Controllable conductance
0.70 to 300 l/sec[1]
Accurate?
Flapper seal
None (non-sealing)[1]
Accurate?
Closed leakage
N/A[1]
Accurate?
Number of bolt holes
4[1]
Accurate?
Materials exposed to process
316L SS, Viton[1]
Accurate?
External leakage at shaft seal
1 x 10^-7 scc/sec He[1]
Accurate?
Valve body operating temperature
0° to 90° C (32° to 194° F) max[1]
Accurate?
Valve motor ambient operating temperature
0° to 70° C (32° to 158° F) max[1]
Accurate?
Speed (open to close, standard)
7.5 sec[1]
Accurate?
Connector
15-pin Type "D" connector at end of 6" pigtail cable[1]
Accurate?
Patent
U.S. Patent No. 4,327,894[1]
Accurate?
CE mark compliance
EMC Directive 89/336/EEC and Machinery Directive 89/392/EEC[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
253B-2-2-1——Identical to 253B-2-2-2 but includes Viton flapper seal (sealing butterfly valve)nanofab.utah.edu[1]
253B-60-2-2——ASA 2" flange, inside diameter 2.362" (60.0 mm), no flapper seal, controllable conductance TBDnanofab.utah.edu[1]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • FunctionRegulates and, in case of sealing valve, shuts off removal of gas from vacuum chamber[1]
  • Differential pressure across valve1 atm (15 psig) max[1]
  • Actuator featureNonlinear actuator (cosine generator) to linearize valve transfer characteristic[1]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What electrical connector does the valve use?

The valve is equipped with a 15-pin Type "D" connector.[1]

Not publicly documented

The following facts about the 253B-2-2-2 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 253B-2-2-2 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the 253B-2-2-2 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 253B-2-2-2 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 253B-2-2-2 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the 253B-2-2-2 are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edu — nanofab.utah.edunanofab.utah.edu
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Last updated Sep 22, 2026.