Veeco
Four Point
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Veeco Four Point Probe is used for measuring resistivity and calculating sheet resistance of samples. The Veeco FP-100 Four Point Probe can penetrate thin insulating surface layers with a short 170V pulse when the penetrate function is selected. The Veeco FPP 5000 Four Point Probe is a 4-point probe test unit.[1][2]
What it is
How it works
The Veeco four point probe can penetrate thin insulating surface layers by applying a short high-voltage pulse to the probe tips when the penetrate function is selected.[1]
For low resistivity samples, the type determination is made by applying an AC signal between two probes and monitoring the DC bias of the wafer with a third probe. Lightly doped semiconductors form rectifying contacts with the probe tips, causing the wafer bias to go positive for N-type material and negative for P-type material. Highly doped semiconductors may use the thermoelectric effect for type determination.[1]
Where it fits in the process flow
General reference — not yet source-verifiedFour-point probe measurements are typically performed after thin-film deposition, doping, or other processing steps where knowledge of the electrical characteristics of the top layer is required. The measurement is generally a post-process characterization step rather than an in-line tool integrated into the process sequence.
What do the numbers mean?
Power & electrical2
Configuration & options7
Vintage & configurations
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
What measurements does the Veeco Four Point Probe perform?
The Veeco Four Point Probe measures resistivity and calculates sheet resistance.[1]
Can the Veeco Four Point Probe test through a surface layer?
The Veeco four point probe can penetrate thin insulating surface layers by applying a short 170v pulse to the probe tips when the penetrate function is selected.[1]
What additional outputs does the Veeco FPP 5000 provide?
The Veeco FPP 5000 can display V/I multiplied by the programmed geometric constant, sheet resistance, bulk resistivity, thickness, and type-test results.[2]
Not publicly documented
The following facts about the Four Point are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Four Point are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Four Point are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Four Point are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Four Point is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Four Point are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]fabweb.ece.illinois.edu — fabweb.ece.illinois.edufabweb.ece.illinois.edu
- [2]aggiefab.tamu.edu — aggiefab.tamu.eduaggiefab.tamu.edu
- [3]Equipment inventory listing
Last updated Oct 7, 2026.
