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Veeco

ADS 800 Dicing

Dicing & GrindingVeeco ADS 800 Dicing family
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ADS 800 Dicing — Inventory photo
Fig. 01ADS 800 DicingInventory photo[1]

Power

220 VAC[1]

Vacuum

200 mm Porous Ceramic Vacuum Chuck[1]

Performance

1.6 Arc Sec Accuracy[1]

Optics

Single Blade Height Detector[1]

What it is

The Veeco ADS 800 Dicing System is configured with motion, control, vision, and coolant delivery components.[2]

How it works

The Veeco ADS 800 Dicing System includes XYZ-axis motion, a rotary stage, an air spindle, a single blade height detector, a vacuum chuck, a vision system, and coolant delivery hardware.[1][2]

The Veeco ADS 800 Dicing System is supported by HMI software and computer control.[1][3]

Where it fits in the process flow

The Veeco ADS 800 Dicing System is arranged for workpiece processing up to 8 inch.[3]

Applications

General reference — not yet source-verified

Dicing systems are used for separating patterned semiconductor workpieces and similar substrates into discrete pieces after fabrication.

What do the numbers mean?

Power & electrical6

Voltage
220 VAC[1]
Accurate?
Phase
3 Phase[1]
Accurate?
50/60 Hz[1]
Accurate?
30 Amp[1]
Accurate?
Controller and Electrical Components[1]
Accurate?
Power requirement
220 VAC, 3-phase, 50/60 Hz, 30 Amp[1]
Accurate?

Vacuum & pumping2

200 mm Porous Ceramic Vacuum Chuck[1]
Accurate?
Vacuum / Pneumatic Package:[1]
Accurate?

Optics & imaging2

Single Blade Height Detector[1]
Accurate?
Single Blade Height Detector:[1]
Accurate?

Performance1

1.6 Arc Sec Accuracy[1]
Accurate?

Control & software3

Computer and Front End[1]
Accurate?
Components
motion, control, vision, and coolant delivery components[2]
Accurate?
HMI software
Veeco HMI Software[3]
Accurate?

Configuration & options13

Main Frame & Casting[1]
Accurate?
XYZ Axis[1]
Accurate?
Accessories Package:[1]
Accurate?
2" Air Spindle[1]
Accurate?
Assy, Guard & Nozzle[1]
Accurate?
Rotary Stage:[1]
Accurate?
(+ - 180 Deg)[1]
Accurate?
Kit[1]
Accurate?
Vision System[1]
Accurate?
Workpiece size
up to 8 inch[3]
Accurate?
Spindle
high-performance air bearing spindle[3]
Accurate?
Motion structure
single-piece bridge cast iron structure[3]
Accurate?
Blade capability
multi-blade capabilities[3]
Accurate?
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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage220 VAC[1]
  • Phase3 Phase[1]
  • Configuration50/60 Hz[1]
  • Configuration30 Amp[1]
  • ConfigurationController and Electrical Components[1]
  • Configuration200 mm Porous Ceramic Vacuum Chuck[1]
  • ConfigurationVacuum / Pneumatic Package:[1]
  • Power requirement220 VAC, 3-phase, 50/60 Hz, 30 Amp[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What power requirement is specified for the Veeco ADS 800 Dicing System?

The Veeco ADS 800 Dicing System is specified with 220 VAC, 3-phase, 50/60 Hz, 30 Amp power.[1][2]

Not publicly documented

The following facts about the ADS 800 Dicing are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ADS 800 Dicing are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the ADS 800 Dicing are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the ADS 800 Dicing are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the ADS 800 Dicing are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the ADS 800 Dicing is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (9)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]schmidt.com.tw — schmidt.com.twschmidt.com.tw
  4. [4]Equipment inventory listing
  5. [5]Equipment inventory listing
  6. [6]web.archive.orgweb.archive.org
  7. [7]Equipment inventory listing
  8. [8]web.archive.orgweb.archive.org
  9. [9]Equipment inventory listing
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Last updated Oct 4, 2026.

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