Trion

Titan Loadlock

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TrionTitan Loadlock

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What it is

General reference — not yet source-verified

The Trion Titan Loadlock is a plasma deposition system. The system uses a loadlock configuration to enable wafer transfer without compromising the chamber vacuum.

How it works

The Trion Titan Loadlock uses an Edwards STPA 1303 C turbo pump to achieve the required vacuum levels. Active substrate temperature control and Neslab chillers maintain the wafer at desired temperatures during the deposition process. Control is provided by a PLC and touch screen interface.^[1]^[2]

Applications

General reference — not yet source-verified

The Trion Titan Loadlock can deposit a range of thin films used in semiconductor, MEMS, and optical applications. Typical materials include silicon dioxide, silicon nitride, and other inorganic compounds.

What do the numbers mean?

Vacuum & pumping5

Without dry pumps and lower electrode chiller^[1]; Vacuum casette elevator^[1]
Turbo pump: Edwards STPA 1303 C^[1]
Vacuum cassette elevator: Yes^[1]
Configuration note: Without dry pumps and lower electrode chiller^[1]

Wafer handling3

Active substrate temperature control^[1]
Wafer sizes: 3 inch^[1]
Substrate temperature control: Active^[1]

Control & software2

PLC and touch screen control^[1]
Control: PLC and touch screen control^[1]

Configuration & options2

Neslab chillers^[1]
Chillers: Neslab chillers^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationWithout dry pumps and lower electrode chiller^[1]
ConfigurationVacuum casette elevator^[1]
Turbo pumpEdwards STPA 1303 C^[1]
Vacuum cassette elevatorYes^[1]
Configuration noteWithout dry pumps and lower electrode chiller^[1]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What wafer size does the Trion Titan Loadlock support?

The system is configured for 3-inch wafers.^[1]^[2]

What type of pump does the system use?

The system uses an Edwards STPA 1303 C turbo pump.^[1]^[2]

What control interface does the system have?

The system uses a PLC and touch screen control interface.^[1]^[2]

Does the system have temperature control for the substrate?

Yes, the system features active substrate temperature control.^[1]^[2]

What chillers are used in the Trion Titan Loadlock?

Neslab chillers are used in the system.^[1]^[2]

Not publicly documented

The following facts about the Titan Loadlock are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Titan Loadlock are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Titan Loadlock are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Titan Loadlock are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Titan Loadlock are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Titan Loadlock is not on record.
Answerable by: an OEM datasheet or a fab qualification report