TEGAL
415
The Tegal 415 is a plasma asher for semiconductor processing. The Tegal 415 features an aluminum chamber with internal dimensions of 6 in x 6 in x 10 in. The Tegal 415 can be equipped with an optional rebuilt direct drive pump prepared for Fomblin/Krytox.[1][2]
What it is
How it works
General reference — not yet source-verifiedA plasma asher generates an oxygen plasma inside a vacuum chamber. The reactive oxygen species chemically react with organic photoresist, converting it into volatile byproducts such as carbon dioxide and water vapor, which are then evacuated from the chamber.
Where it fits in the process flow
General reference — not yet source-verifiedPlasma ashers are used in semiconductor fabrication after etching, ion implantation, or other processes that leave a photoresist layer. The ashing step removes the photoresist before subsequent cleaning, metrology, or further processing steps.
What do the numbers mean?
Vacuum & pumping1
Wafer handling1
- Refurbished Wafer Prober
- Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1]
Optics & imaging1
- Refurbished Mask Aligner
- Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1]
Configuration & options8
- Refurbished RTP RTA
- AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1]
- KLA-Tencor Spare Parts and Service
- RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1]
- Refurbished Isotropic Plasma Etcher
- Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1]
- Refurbished PECVD, ALD Equipment
- Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1]
Observed configurations
How individual machines were equipped when they appeared on the secondary market — as listed, per unit. These describe one specific machine, not the model in general.
Unit as listed[1]
- Optional rebuilt direct drive pump
- Optional Fomblin/Krytox prep
- Reclaimed Fomblin/Krytox oil
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Optional pumpRebuilt direct drive pump, Fomblin/Krytox preparation available[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 415 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 415 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 415 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 415 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 415 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 415 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]dealer listingsemistarcorp.com
- [2]jmind.com — jmind.comjmind.com
- [3]asseta.comasseta.com
Last updated Oct 11, 2026.
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