SUSS MicroTec

ACS 200 Spin

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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

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What it is

The SUSS MicroTec ACS 200 is an automated photoresist coating and baking station with cassette-to-cassette substrate operation. The tool supports both spin coating and spray coating of photoresist on a variety of substrates. The ACS 200 provides complete resist coating capabilities, including hotplate baking and automated edge-bead removal with backside rinse.^[1]

Applications

Typical applications of the ACS 200 include photoresist coating for optical pattern exposure and photoresist coating for mask production.^[1]

What do the numbers mean?

Wafer handling3

Maximum wafer diameter: 200 mm (8 in)^[1]
Maximum substrate thickness: 5 mm^[1]
Wafer diameters supported: 50 mm, 75 mm, 100 mm, 150 mm, 200 mm^[1]

Optics & imaging1

Photomask sizes supported: 125 mm x 125 mm, 150 mm x 150 mm^[1]

Configuration & options4

Coating modules: Gyrset spin coat; Alta spray coat^[1]
Hotplate maximum temperature: 250 °C^[1]
Edge-bead removal: Automated with backside rinse^[1]
Small pieces supported: Yes^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
ACS200 Gen3	—	—	Newest generation of ACS200 as of 2016, four units installed in Russia	doi.org^[2]

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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the maximum wafer diameter supported by the ACS 200?

The maximum wafer diameter is 200 mm (8 inches).^[1]

What hotplate temperature can the ACS 200 reach?

The programmable hotplate can reach up to 250 °C.^[1]

Does the ACS 200 support spray coating?

Yes, it is equipped with an Alta spray coat module.^[1]

Not publicly documented

The following facts about the ACS 200 Spin are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ACS 200 Spin are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the ACS 200 Spin are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the ACS 200 Spin are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the ACS 200 Spin is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the ACS 200 Spin are on record.
Answerable by: an OEM parts catalog or a service engineer