SUSS MicroTec
ACS 200 Linear Wafer Tracks
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
The ACS200 uses cassette-to-cassette substrate handling, spin coating, spray coating, hotplate baking, automated edge-bead removal, and backside rinse.[4]
The ACS200 includes separate coating and development stations, and the system can process coating and development flows in parallel under operator control.[6]
Applications
The ACS200 Gen3 is used for research and high-volume manufacturing.[3]
The ACS200 supports photoresist coating for optical pattern exposure and photoresist coating for mask production.[4]
What do the numbers mean?
Wafer handling5
Gas & chemistry3
Optics & imaging1
Configuration & options4
Vintage & configurations
- 2016Reference use in 2016[1]
Four ACS200 Gen3 automatic coater/developer machines are stated as installed in Russia in 2016.
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| ACS200 Gen3 | — | — | Described as a 200mm automated coater & developer for 100 mm to 200 mm wafers. | suss.com[3] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What kind of equipment is the SUSS ACS 200 Linear Wafer Tracks?
It is a wafer-track system used as a resist coater and developer.[2]
Not publicly documented
The following facts about the ACS 200 Linear Wafer Tracks are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
The control-system platform and OS era of the ACS 200 Linear Wafer Tracks are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the ACS 200 Linear Wafer Tracks are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the ACS 200 Linear Wafer Tracks is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the ACS 200 Linear Wafer Tracks are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the ACS 200 Linear Wafer Tracks are on record.
Answerable by: university cleanroom staff or an OEM application specialist
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]doi.org — doi.orgdoi.org
- [2]Equipment inventory listing
- [3]suss.com — suss.comsuss.com
- [4]nist.gov — nist.govnist.gov
- [5]ACS 200 Linear Wafer Tracks — SUSS MicroTec | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [6]https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2025/04/ACS200_manual_2025.pdf — epfl.chepfl.ch
Last updated Oct 5, 2026.
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