Waferpedia

Strasbaugh

6DE

CMP16 inch / 400 mmStrasbaugh 6DE family
Research Quality: 40% complete

The Strasbaugh 6DE is a four-spindle grinder/polisher with a DC drive system and a part capacity of 16 inches (400 mm).[1]

6DE — excelltechnology.com
Fig. 016DEexcelltechnology.com[1]

Wafer size

16 inch / 400 mm

Vacuum

4 for pressure down[1]

How it works

The Strasbaugh 6DE uses a DC drive system with separate motors for spindle rotation and eccentric oscillation. Each spindle is driven by a 1.5 horsepower DC motor, and each eccentric or oscillating arm is driven by a 0.75 horsepower DC motor. The machine includes air cylinders to apply downward pressure on the workpiece during processing.[1]

What do the numbers mean?

Vacuum & pumping6

Air cylinders
4 for pressure down[1]
Accurate?
Includes air cylinders for pressure down
Yes[1]
Accurate?
Pressure down system
Four air cylinders for pressure down[1]
Accurate?
Pressure down system
4 air cylinders for pressure down[1]
Accurate?
Air cylinders for pressure down
Yes, included[1]
Accurate?
Pressure down
Four air cylinders[1]
Accurate?

Control & software1

Controls
Fully equipped control panel[1]
Accurate?

Configuration & options38

Number of spindles
4[1]
Accurate?
Part capacity
16 inches (400 mm)[1]
Accurate?
Spindle motor power
1.5 HP DC each[1]
Accurate?
Eccentric motor power
0.75 HP DC each[1]
Accurate?
Capacity (12-inch variant)
12 inches[1]
Accurate?
Capacity (16-inch variant)
16 inches / 400 mm[1]
Accurate?
Spindle motor power
1.5 HP DC[1]
Accurate?
Eccentric motor power
0.75 HP DC[1]
Accurate?
Drive system
DC[1]
Accurate?
Capacity
16 in / 400 mm part diameter[1]
Accurate?
Spindle motors
Four 1.5 HP DC spindle motors[1]
Accurate?
Eccentric/oscillating arm motors
Four 3/4 HP DC motors[1]
Accurate?
Drive type
DC drive system[1]
Accurate?
Number of spindles
4 (4-spindle configuration)[1]
Accurate?
Part capacity
16 inch / 400 mm[1]
Accurate?
Spindle motors
4 x 1.5 HP DC spindle motors[1]
Accurate?
Eccentric/oscillating arm motors
4 x 3/4 HP DC motors[1]
Accurate?
Drive system
DC drive[1]
Accurate?
Machine type
Spindle grinder/polisher[1]
Accurate?
Capacity
12 in[1]
Accurate?
Drive system
DC drive system[1]
Accurate?
OEM
Strasbaugh[1]
Accurate?
Model
6DE[1]
Accurate?
Type
Spindle grinder/polisher[1]
Accurate?
Spindle count
6 spindle[1]
Accurate?
Motors
Includes four 1.5 HP DC spindle motors and four 3/4 HP DC motors for the eccentric/oscillating arms[1]
Accurate?
Capacity variant
16 in parts capacity[1]
Accurate?
Rebuild status variant
Excell 2022/rebuild[1]
Accurate?
Eccentric motor power
0.75 HP DC (3/4 HP)[1]
Accurate?
Maximum part diameter
16 inches (400 mm)[1]
Accurate?
Part capacity (12-inch variant)
12 inches[1]
Accurate?
Part capacity (16-inch variant)
16 inches[1]
Accurate?
Category
Spindle grinder/polisher[1]
Accurate?
Capacity
12-inch capacity[1]
Accurate?
Designation
6DE-DC[1]
Accurate?
Spindle count
4 spindle[1]
Accurate?
Parts capacity
16-inch parts capacity[1]
Accurate?
Eccentric motors
Four 3/4 HP DC motors for the eccentric/oscillating arms[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
6DE-DC——DC drive systemexcelltechnology.com[1]
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What replaced it?

  • siblingStrasbaugh 6DF— Similar spindle grinder/polisher model from the same OEMsource[1]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Air cylinders4 for pressure down[1]
  • Includes air cylinders for pressure downYes[1]
  • Pressure down systemFour air cylinders for pressure down[1]
  • Pressure down system4 air cylinders for pressure down[1]
  • Air cylinders for pressure downYes, included[1]
  • Pressure downFour air cylinders[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of drive system does the Strasbaugh 6DE use?

The Strasbaugh 6DE uses a DC drive system with separate motors for spindle rotation and eccentric oscillation.[1]

What are the motor specifications for the Strasbaugh 6DE?

Each spindle is driven by a 1.5 horsepower DC motor, and each eccentric arm is driven by a 0.75 horsepower DC motor.[1]

Does the Strasbaugh 6DE have pneumatic downforce control?

Yes, the machine includes air cylinders for applying downward pressure to the workpiece during polishing or grinding.[1]

Not publicly documented

The following facts about the 6DE are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 6DE are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the 6DE are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 6DE are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 6DE is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the 6DE are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]excelltechnology.com — excelltechnology.comexcelltechnology.com
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Last updated Oct 7, 2026.

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