Pfeiffer
TPU 060 Turbomolecular Vacuum
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
Where it fits in the process flow
The TPU 060 is used as a high-vacuum pump in a system backed by a roughing pump and controlled by a pump controller.[4]
Applications
What do the numbers mean?
Vacuum & pumping2
Configuration & options5
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| TPU 060 Mod PM P 01 401 | — | — | Modification code PM P 01 401 | Equipment inventory listing[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Why is a backing pump commonly used with this class of machine?General reference — not yet source-verified
A backing pump reduces the pressure enough for the turbomolecular pump to operate effectively and maintain high-vacuum conditions.
What kinds of systems rely on this class of vacuum pump?General reference — not yet source-verified
Vacuum chambers, analytical instruments, process tools, and other equipment that require clean evacuated spaces commonly rely on this class of pump.
Not publicly documented
The following facts about the TPU 060 Turbomolecular Vacuum are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the TPU 060 Turbomolecular Vacuum are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the TPU 060 Turbomolecular Vacuum are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the TPU 060 Turbomolecular Vacuum are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the TPU 060 Turbomolecular Vacuum is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the TPU 060 Turbomolecular Vacuum are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (7)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]waferpedia.comwaferpedia.com
- [4]reticulum.online — reticulum.onlinereticulum.online
- [5]Pfeiffer TPU 060 Turbomolecular Vacuum Pump - Asset 142564 - Fab Spares LLC — fab-spares.comfab-spares.com
- [6]Pfeiffer TPU 060 Turbomolecular Vacuum Pump - Asset 142563 - Fab Spares LLC — fab-spares.comfab-spares.com
- [7]Pfeiffer Vacuum TPH / TPU 060 Turbomolecular Pump - REPAIR SERVICE — ptbsales.comptbsales.com
Last updated Oct 9, 2026.
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