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Pfeiffer

Adixen ADS 1202 P

Pfeiffer Adixen ADS 1202 P family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Pfeiffer / Adixen ADS 1202 P is a dry pump. The Pfeiffer / Adixen ADS 1202 P has a pumping speed of 676 CFM (60Hz) and an ultimate pressure of 3.7 x 10-4 Torr (60Hz, typical).[1]

PfeifferAdixen ADS 1202 P
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What it is

The Pfeiffer Adixen ADS 1202 P is a dry pump used in semiconductor vacuum systems.[2][3][1]

The ADS 1202 P is manufactured by Pfeiffer Vacuum under the Adixen brand.[2][1]

Applications

The Pfeiffer Adixen ADS 1202 P is used in ashing, stripping, dielectric deposition and etching, and poly etch-implant source processes.[1]

What do the numbers mean?

Vacuum & pumping3

Product type
Dry pump[1]
Accurate?
Pumping speed
676 CFM (60Hz)[1]
Accurate?
Ultimate pressure
3.7 x 10-4 Torr (60Hz, typical)[1]
Accurate?

Dimensions & facilities1

Weight
1,160 lbs[1]
Accurate?

Configuration & options2

Make
Pfeiffer / Adixen[2]
Accurate?
Manufacturer
Alcatel/Adixen[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Product typeDry pump[1]
  • Pumping speed676 CFM (60Hz)[1]
  • Ultimate pressure3.7 x 10-4 Torr (60Hz, typical)[1]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the pumping speed of the Pfeiffer Adixen ADS 1202 P?

The pumping speed is 676 CFM at 60 Hz.[1]

What ultimate pressure can the ADS 1202 P achieve?

The ultimate pressure is 3.7 × 10⁻⁴ Torr (typical at 60 Hz).[1]

Not publicly documented

The following facts about the Adixen ADS 1202 P are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Adixen ADS 1202 P are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Adixen ADS 1202 P are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Adixen ADS 1202 P are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Adixen ADS 1202 P are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Adixen ADS 1202 P is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]provac.com — provac.comprovac.com
  2. [2]Equipment inventory listing
  3. [3]Adixen ADS 1202 P — Pfeiffer | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 2, 2026.

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