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Pfeiffer

ACP28G

Deposition100mmPfeiffer ACP28G family
Research Quality: 30% complete

The Pfeiffer Adixen ACP28G dry vacuum pump is designed for pumping traces of corrosive gas. The Pfeiffer Adixen ACP28G uses a frictionless multi-stage roots design and requires an inert gas purge to protect its bearings. The Pfeiffer Adixen ACP28G operates on any input voltage from 90 to 254 VAC at 50 or 60 Hz.[1]

PfeifferACP28G
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Wafer size

100mm

Power

90 to 254 VAC at 50 or 60 Hz[3]

Vacuum

Dry pump[2]

What it is

The Pfeiffer ACP28G is a dry roughing vacuum pump based on a multi-stage roots (rotary lobe) design. The pump is designed for operation without lubricants inside the pumping module. The ACP28G variant is intended for pumping traces of corrosive gas and requires an inert gas purge to protect the pump bearings.[4][3]

Dry pumps such as the ACP28G provide oil-free and particulate-free vacuum. The ACP28G has a pumping speed of 27 m³/h (16 cfm) and an ultimate pressure of 22.5 mTorr. The pump is air cooled and includes an integrated digital timer.[4][3]

The pump accepts input voltages from 90 to 254 VAC at 50 or 60 Hz via a single-phase integrated frequency converter. The ACP28G has a KF25 inlet and KF25 exhaust.[4][3]

How it works

The ACP28G includes a single-phase integrated frequency converter with automatic voltage range selection, which keeps rotational speed and pumping speed constant across the input range of 90 to 254 VAC at 50 or 60 Hz.[4][3]

The inert gas purge protects pump bearings from corrosive gases. The pumping module contains no lubricants, eliminating hydrocarbon backstreaming and particle generation from tip seals.[4][3]

What do the numbers mean?

Power & electrical1

Voltage range
90 to 254 VAC at 50 or 60 Hz[3]
Accurate?

Vacuum & pumping5

Pump type
Dry pump[2]
Accurate?
Role
Loadlock primary pump[2]
Accurate?
Pump type
Dry rotary lobe vacuum pump (dry multi-stage roots design)[3]
Accurate?
Intended application
Pumping traces of corrosive gas[3]
Accurate?
Pumping mechanism
Frictionless multi-stage roots design[3]
Accurate?

Configuration & options3

Manufacturer
Pfeiffer[2]
Accurate?
Contextual system
EVA 451 evaporator[2]
Accurate?
Overhaul interval
22,000 hours[3]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Pump typeDry pump[2]
  • RoleLoadlock primary pump[2]
  • Pump typeDry rotary lobe vacuum pump (dry multi-stage roots design)[3]
  • Intended applicationPumping traces of corrosive gas[3]
  • Pumping mechanismFrictionless multi-stage roots design[3]
  • Voltage range90 to 254 VAC at 50 or 60 Hz[3]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the pumping speed of the ACP28G?

The ACP28G has a pumping speed of 27 m³/h (16 cfm).[4][3]

What is the ultimate pressure of the ACP28G?

The ultimate pressure is 22.5 mTorr.[4][3]

What are the inlet and exhaust connections on the ACP28G?

The pump has a KF25 inlet and KF25 exhaust.[4][3]

What input voltage range does the ACP28G accept?

The pump operates on input voltages from 90 to 254 VAC at 50 or 60 Hz.[4][3]

Is the ACP28G designed for corrosive gases?

Yes, the ACP28G is specially designed for pumping traces of corrosive gas and requires an inert gas purge to protect the pump bearings.[4][3]

Not publicly documented

The following facts about the ACP28G are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ACP28G are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the ACP28G are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the ACP28G are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the ACP28G are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the ACP28G is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]Ideal Vacuum | Pfeiffer Adixen ACP 28G Dry Vacuum Pump For Pumping Traces of Corrosive Gas PN V6GATSGABF Pfeiffer Vacuum — idealvac.comidealvac.com
  2. [2]epfl.ch — epfl.chepfl.ch
  3. [3]idealspectroscopy.com — idealspectroscopy.comidealspectroscopy.com
  4. [4]Ideal Vacuum | Pfeiffer Adixen ACP 28G Dry Vacuum Pump For Pumping Traces of Corrosive Gas PN V6GATSGABF Pfeiffer Vacuum — idealvac.comidealvac.com
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Last updated Sep 22, 2026.

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