Optorun

OTFC 1300 CBI Thin Film

Precision Optics Optorun OTFC 1300 family

Research Quality: 20% complete

The Optorun OTFC 1300 CBI Thin Film is a thin film coater. The Optorun OTFC 1300 CBI Thin Film uses center driving and a substrate dome size of φ1130 mm. The Optorun OTFC 1300 CBI Thin Film has EBsourcex2, a substrate heater with 350°C max, and a 60-point optical thickness monitor.^[1]^[2]

OptorunOTFC 1300 CBI Thin Film

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What is it?

The Optorun OTFC 1300 CBI is a thin film coater with center driving, a substrate dome size of φ1130 mm, EBsourcex2, a substrate heater with 350°C max, and a 60-point optical thickness monitor.

What do the numbers mean?

Wafer handling4

Center driving Substrate dome size φ1130mm^[1]; Substrate heater 350℃ max^[1]
Substrate dome size: φ1130 mm^[1]
Substrate heater: 350°C max^[1]

Optics & imaging4

60-point optical thickness monitor^[1]
Category: Precision Optics^[2]
Electron beam sources: EBsourcex2^[1]
Optical thickness monitor: 60-point^[1]

Configuration & options2

EBsourcex2^[1]
Drive configuration: Center driving^[1]

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Not publicly documented

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Frequently asked questions

What is the substrate dome size?

The substrate dome size is φ1130 mm.^[1]^[2]

How many electron beam sources does the system have?

The system has two electron beam sources (EBsourcex2).^[1]^[2]

How many points does the optical thickness monitor have?

The optical thickness monitor has 60 points.^[1]^[2]

Not publicly documented

The following facts about the OTFC 1300 CBI Thin Film are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the OTFC 1300 CBI Thin Film are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the OTFC 1300 CBI Thin Film are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the OTFC 1300 CBI Thin Film are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the OTFC 1300 CBI Thin Film are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the OTFC 1300 CBI Thin Film is not on record.
Answerable by: an OEM datasheet or a fab qualification report