Ontrak
DSS 200 Post
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Ontrak DSS 200 Post is a double-sided PVA scrubber. The Ontrak DSS 200 Post is used for post-CMP cleaning and related wafer-cleaning applications. The Ontrak DSS 200 Post is configured for wafers from 100mm to 200mm.[1][2][3]
What it is
The Ontrak DSS 200 Post is a post-CMP wafer cleaner in the OnTrak DSS 200 family. The tool is a double-sided PVA scrubber for semiconductor wafer cleaning.[1][9][3]
How it works
Applications
What do the numbers mean?
Wafer handling2
Configuration & options4
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Ontrak DSS200 Series 1 | — | — | Designed to clean 100mm to 200mm wafers and has a universal load station. | axustech.com[2] |
| Ontrak DSS200 Series 2 | — | — | Offers production-proven cleaning results, throughputs of 45-65 wafers per hour, and a 200mm ergonomic load station. | axustech.com[1] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the DSS 200 Post are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DSS 200 Post are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the DSS 200 Post are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the DSS 200 Post are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the DSS 200 Post is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the DSS 200 Post are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (9)Every fact above is drawn from these public sources
- [1]axustech.com — axustech.comaxustech.com
- [2]axustech.com — axustech.comaxustech.com
- [3]OnTrak DSS200 Series 2 Post CMP Scrubber — s3-alliance.coms3-alliance.com
- [4]Inventory photo
- [5]Inventory photo
- [6]Inventory photo
- [7]inventory listing
- [8]inventory listing
- [9]The Entrepix OnTrak DSS-200 Cleaner - Post-CMP Scrubber - CE/Synergy/Integra — Entrepix - An Amtech Company - CMP Equipment, Parts, Service, and Success — entrepix.comentrepix.com
Last updated Oct 11, 2026.
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