Nikon
1505
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The Nikon 1505 G6E variant is configured for g-line (436 nm) exposure with a numerical aperture of 0.54.[1]
Where it fits in the process flow
The Nikon 1505 is positioned after photoresist coating and softbake in the photolithographic process flow, and before the develop step.[1]
Applications
The Nikon 1505 is applied in microelectronic device fabrication for exposing positive photoresists optimized for g-line exposure, such as the MICROPOSIT S1813 G2 photoresist.[1]
- Semiconductor photoresist exposure
What do the numbers mean?
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Not publicly documented
The following facts about the 1505 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
Fewer than 3 independently cited specifications for the 1505 are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 1505 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 1505 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 1505 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 1505 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]ece.utoronto.ca — ece.utoronto.caece.utoronto.ca
Last updated Oct 9, 2026.