Waferpedia

MRSI

505

Packaging & BondingMRSI 505 family
Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

505 — Inventory photo
Fig. 01505Inventory photo[1]

What is it?

The MRSI 505 is an ultra-precision, vision-guided, fully automatic, high-speed robotic assembly work cell used for semiconductor pick-and-place and bonding applications.

What do the numbers mean?

Vacuum & pumping1

Vacuum System
Vacuum Surface Pick Up Valves, Meter & Tubing[2]
Accurate?

Optics & imaging3

X-Y Resolution
0.5 micron[2]
Accurate?
Camera System
Three Dual Magnification IR Cameras with Programmable Lighting; Look-up Camera for Flip Chip[2]
Accurate?
Inspection Station
Bottom mounted camera[2]
Accurate?

Control & software1

Controller
Rack Mount Industrial Computer[2]
Accurate?

Configuration & options4

Platform Material
Solid Granite Overhead and Base Platform[2]
Accurate?
X-Y Axis Motors
Two Linear Anarad DC Motors with Glass Encoders[2]
Accurate?
Z Axis Motor
One Brushless Ball Screw Drive Motor[2]
Accurate?
Work Surface
Large work surface accommodates most input and output options[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Vacuum SystemVacuum Surface Pick Up Valves, Meter & Tubing[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 505 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 505 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 505 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 505 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 505 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 505 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]gtsaz.comgtsaz.com
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Last updated Sep 23, 2026.

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